Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1994-01-24
1995-10-17
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356359, 359370, G01B 902
Patent
active
054595762
ABSTRACT:
A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results.
REFERENCES:
patent: 4833621 (1989-05-01), Umatate
patent: 4844616 (1989-07-01), Kulkarni et al.
patent: 4953188 (1990-08-01), Siegel et al.
Brunfeld Andrei
Laver Ilan
Toker Gregory
Yaniv Zvi
Display Inspection Systems, Inc.
Massaroni Kenneth M.
Turner Samuel A.
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