Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1994-02-28
1996-06-04
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356351, 356359, G01B 902
Patent
active
055238394
ABSTRACT:
The present invention is an on-line manufacturing process control system and method using a twin or dual beam heterodyned optical interferometer as the monitor of changes in the surface characteristics of an object while the object is being manufactured. The changes in the surface characteristics can then be used as data by automated equipment either to determine whether the manufactured object monitored at a given time meets predetermined quality standards or to automatically alter various individual phases of the manufacturing process in order for the surface characteristics of the manufactured object to conform to predetermined quality standards.
REFERENCES:
patent: 3796495 (1974-03-01), Laub
patent: 4353650 (1982-10-01), Sommargren
patent: 4848908 (1989-07-01), Huang
patent: 4948251 (1990-08-01), Komdo
patent: 4978219 (1990-12-01), Bessho
patent: 5139336 (1992-08-01), See et al.
See et al., Scanning differential phase contrast optical microscope: application to surface studies, Applied Optics, vol. 24 No. 15, pp. 2373-2379, Aug. 1, 1985.
Sommargren, Gary; Optical heterodyne profilometry, Applied Optics, vol. 20 No. 04, pp. 610-618, Feb. 15, 1981.
Robinson et al.; Applications of Interferometric Measurements of Surface Topography of Moving Magnetic Recording Materials; IEEE Transaction on Magnetics, vol. Mag 20, No. 5, (1983) (to be published).
Robinson et al.; The Analysis of Interferometrically Measured Surface Roughness Data, Proceedings of the Sixth International Conference on Video Audio, and Data Recording, University of Sussex, Brighton, England, (to be published) Mar. 17-21 1986.
Peterson et al.; Interferometric Measurements of the Surface Profile of Moving Samples; Applied Optics, vol. 23 No. 10/15, pp. 1464-1466, May 1984.
Robinson et al.; Optical Interferometry of Surfaces; Scientific American, pp. 66-71, Jul. 1991.
Cho et al.; Measurement of the local slope of a surface by vibrating-sample heterodyne interferometry: a new method in scanning microscopy; Optics Letters, vol. 18 No. 3, pp. 232-234, Feb. 1, 1993.
See et al.; Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation; Appl. Phys. Lett. 53(1), pp. 10-12, Jul. 4, 1988.
Carlson Timothy B.
Denzer Steven M.
Groschen, Jr. Robert P.
Peterson Richard W.
Robinson Glen M.
Minnesota Mining & Manufacturing
Turner Samuel A.
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