Differential motor drive for an XY stage

Details Differential motor drive for an XY stage Differential motor drive for an XY stage

1998-10-09

2000-06-06

Bucci, David A.

Machine element or mechanism

Mechanical movements

Reciprocating or oscillating to or from alternating rotary

74 8922, F16H 2702

Patent

active

060704802

ABSTRACT:
A differential motor drive for an XY stage comprising a fixed base and two moveable platforms where the platforms' movements are orthogonal with respect to each other. Both motors for the X and the Y stages are located on the fixed base and do not move with either of the moving platforms. As the motors rotate at substantially the same speed in substantially opposite directions only the Y stage moves. As the motors rotate at substantially the same speed in substantially the same direction only the X stage moves. As the motors rotate at different speeds in either the same or opposite directions, both the X and Y stages move.

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patent: 5504407 (1996-04-01), Wakui et al.
patent: 5561299 (1996-10-01), Ishida et al.

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