Differential method for layer-to-layer registration

Details Differential method for layer-to-layer registration Differential method for layer-to-layer registration

2008-04-15

2008-04-15

Kassa, Yosef (Department: 2624)

Image analysis

Image transformation or preprocessing

Changing the image coordinates

C382S141000, C382S145000, C382S151000, C348S087000, C348S095000

Reexamination Certificate

active

10889038

ABSTRACT:
A system for precisely measuring layer-to-layer mis-registration is provided. The system includes a new type of mark and a comparison system, which compare the right and left signals from the mark to eliminate non-alignment noise, to enlarge the alignment information hundreds times then the actual shiftiness between two layers and to measure the mis-registration.

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