Measuring and testing – Gas analysis – Impurity
Patent
1994-07-01
1996-12-10
Brock, Michael J.
Measuring and testing
Gas analysis
Impurity
73 1G, G01N 2700
Patent
active
055832822
ABSTRACT:
An in-line detector system and method for real-time detection of impurity concentration in a flowing gas stream. In a specific aspect, the system may comprise an in-line monitoring system for determining the calibrated concentration of an impurity species in a flowing gas stream, in a low concentration range below a predetermined concentration value, and in a high concentration range above said predetermined concentration value. The system may utilize hygrometric sensors in the case of water as a critical impurity, or surface acoustical wave (SAW) devices coated with suitable impurity-affinity coatings. The method includes sensing the impurity species concentration in gas derived from the gas flow stream in a sequential and repetitive sensing operation. In a first sensing mode the gas is purified of impurity species prior to sensing thereof and in a second sensing mode the gas is unpurified. In the first sensing mode and second sensing mode, the cycle times are varied in accordance with the impurity species concentration. In the low concentration range the second sensing mode cycle time is longer than the first sensing mode cycle time and in the high concentration the first sensing mode cycle time is longer than the second sensing mode cycle time.
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Brock Michael J.
Hultquist Steven J.
Millipore Investment Holdings Limited
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