Differential displacement measuring interferometer

Details Differential displacement measuring interferometer Differential displacement measuring interferometer

1990-01-19

1993-02-16

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356351, G01B 902

Patent

active

051875438

ABSTRACT:
A linear displacement interferometer system employs glass wedge prisms (71, 73, 75, 76) diposed about the interferometer axis of symmetry to refract the beams (51A, 55A) produced by the interferometer onto a single area (72, 86) approximately the size of the interferometer beam. If only one spot is produced on each of the stage and reference mirrors (72, 86), then any ambiguity concerning the beams (51B, 55B) is eliminated. In the preferred system, the stage (72) and standard (86) mirrors are located where the refracted beam crosses an interferometer axis of symmetry (80).

REFERENCES:
patent: 3881823 (1975-05-01), DeLang et al.
patent: 4334778 (1982-08-01), Pardue
patent: 4752133 (1988-06-01), Sommargren
patent: 4948257 (1990-08-01), Kaufman

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