Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1992-03-04
1994-05-03
Wieder, Kenneth A.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324650, 324663, 324671, 324681, G01R 2726
Patent
active
053091108
ABSTRACT:
An apparatus for analyzing the dielectric properties of a sample. A thin planar sample having a hole therein is positioned over two bottom electrodes having the hole over one of the bottom electrodes. An oscillator provides a first signal to one of the bottom electrodes and a second signal 180.degree. out of phase with the first signal to the second bottom electrode. A differential signal is obtained on the top electrode representative of the dielectric properties of the sample with the elimination of edge effects. A phase sensitive demodulator synchronized with the oscillator extracts the two components of the conductance and susceptance of the sample. A position sensor measures the thickness of the sample and is used to calculate the dielectric constant of the sample. Thereby, an accurate measurement of the dielectric properties of the sample is obtained without a complicated structure in order to eliminate edge effects.
REFERENCES:
patent: 3879660 (1975-04-01), Piso
patent: 4584885 (1986-04-01), Cadwell
patent: 5065106 (1991-11-01), Hendrick et al.
patent: 5122754 (1992-06-01), Gotaas
McKinley Kerry
O'Neill Michael J.
Brown Glenn W.
Grimes Edwin T.
The Perkin Elmer Corporation
Wahl John R.
Wieder Kenneth A.
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