Different polarization in cross-section of a radiation beam...

Details Different polarization in cross-section of a radiation beam... Different polarization in cross-section of a radiation beam...

2008-01-08

2008-01-08

Mathews, Alan A. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S052000, C355S067000

Reexamination Certificate

active

11177482

ABSTRACT:
A lithographic apparatus comprises an illumination system having optical elements capable of conditioning a radiation beam to comprise in cross-section a first portion of linearly polarized radiation and a second portion of unpolarized or circularly polarized radiation. The apparatus further comprises a support constructed to support a patterning device is provided, the patterning device being capable of imparting the illuminating radiation beam with a pattern in its cross-section to form a patterned radiation beam. A substrate table is provided to hold a substrate, whilst a projection system is provided and configured to project the patterned radiation beam onto a target portion of the substrate.

REFERENCES:
patent: 6310679 (2001-10-01), Shiraishi
patent: 6392800 (2002-05-01), Schuster
patent: 6636295 (2003-10-01), Shiozawa
patent: 6781670 (2004-08-01), Krautschik
patent: 2001/0019404 (2001-09-01), Schuster et al.
patent: 2005/0094268 (2005-05-01), Fiolka et al.

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