Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-11-03
2008-10-14
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S197000, C333S199000, C438S050000
Reexamination Certificate
active
07436271
ABSTRACT:
A MEMS filter has an input layer for receiving a signal input, and an output layer for providing a signal output. The MEMS filter also has a first resonator and a second resonator coupled to the first resonator such that movement transduced in the first resonator by the signal input causes movement of the second resonator which transduces the signal output. A method of manufacturing a MEMS filter is also disclosed. A dielectric layer is formed on a base. A patterned electrode layer is formed at least in part on the dielectric layer. The base is etched to define a resonator structure. A method of adjusting a desired input impedance and an output impedance of a dielectrically transduced MEMS filter having transduction electrodes coupled to a dielectric film is further disclosed. The method includes adjusting a DC bias voltage on the transduction electrodes.
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Bhave Sunil Ashok
Weinstein Dana
Cornell Research Foundation Inc.
Jaeckle Fleischmann & Mugel LLP
Miller Christopher B.
Summons Barbara
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