Coating processes – Electrical product produced – Condenser or capacitor
Patent
1974-10-03
1976-05-11
Esposito, Michael F.
Coating processes
Electrical product produced
Condenser or capacitor
427 89, 427 90, 427 93, 427 94, 427125, 427399, 156 17, 357 15, H01L 502, B05D 512
Patent
active
039565270
ABSTRACT:
A planar integrated circuit structure having a dielectrically isolated Schottky Barrier contact.
The structure has pockets of silicon surrounded by isolating regions of silicon dioxide extending from a planar surface, the silicon dioxide regions and silicon pockets being substantially coplanar at said surface. A layer of dielectric material, such as silicon nitride or a composite of silicon nitride over silicon dioxide, covers the surface. There is at least one opening extending through the dielectric layer to a coincident silicon pocket; the opening has larger lateral dimensions than said pocket so as to expose the pocket and a portion of the silicon dioxide region surrounding the pocket. A metallic layer in this opening forms a Schottky Barrier contact with the exposed silicon.
REFERENCES:
patent: 3585469 (1971-06-01), Jager
patent: 3675313 (1972-07-01), Driver
patent: 3742315 (1973-06-01), Iizuka
patent: 3746950 (1973-07-01), Kano
patent: 3753774 (1973-08-01), Veloric
patent: 3755001 (1973-08-01), Kooi
patent: 3764865 (1973-10-01), Napoli
patent: 3770606 (1973-11-01), Lepselter
Magdo Ingrid E.
Magdo Steven
Esposito Michael F.
IBM Corporation
Kraft J. B.
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