Dielectric VCSEL gain guide

Details Dielectric VCSEL gain guide Dielectric VCSEL gain guide

2007-10-02

2010-12-28

Trinh, Michael (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Groove formation

C438S046000, C438S047000, C257SE21108

Reexamination Certificate

active

07858417

ABSTRACT:
A vertical cavity surface emitting laser having a dielectric gain guide. The gain guide may provide current confinement, device isolation and possibly optical confinement. The first mirror and an active region may be grown. A pattern may be placed on or near the active region. A dielectric material may be deposited on the pattern and the pattern may be removed resulting in a gain guide. Then a top mirror may be grown on the gain guide. This structure with the dielectric gain guide may have specific characteristics and/or additional features.

REFERENCES:
patent: 5719891 (1998-02-01), Jewell
patent: 5724374 (1998-03-01), Jewell
patent: 5985683 (1999-11-01), Jewell
patent: 6014395 (2000-01-01), Jewell
patent: 6233267 (2001-05-01), Nurmikko
patent: 6888873 (2005-05-01), Kwon

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