Dielectric thin film

Details Dielectric thin film Dielectric thin film

1986-07-14

1988-03-29

Swisher, Nancy A. B.

Stock material or miscellaneous articles

Composite

Of inorganic material

361 22, 428698, 427 34, B32B 1900, B32B 900

Patent

active

047343400

ABSTRACT:
A high dielectric constant capacitor comprising a thin film deposited on a substrate, the thin film being composed of a mixture of a tantalum oxide and a titanium oxide wherein the ratio of Ti to Ta is in the range from 0.1 to 4 atomic percent.

REFERENCES:
patent: 2899345 (1959-08-01), Oshy
patent: 2960642 (1960-11-01), Rudnay
patent: 3320500 (1967-05-01), Axelrod et al.

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