Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-12-18
2007-12-18
Sugarman, Scott J. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S231000, C359S556000
Reexamination Certificate
active
11264959
ABSTRACT:
In one embodiment, a capacitive micro electro-mechanical systems (MEMS) device includes a dielectric spacer between a bottom electrode and a movable member. The movable member may serve as a top electrode. A gap separates the top electrode from the dielectric spacer. The movable member may be actuated to deflect towards the bottom electrode by electrostatic force. The dielectric spacer reduces the height of the gap that would otherwise be formed between a top surface of the bottom electrode and a bottom surface of the movable member, thereby improving squeeze-film damping. The movable member may be a ribbon of a ribbon-type diffractive spatial light modulator, for example.
REFERENCES:
patent: 6750998 (2004-06-01), Kruschwitz et al.
patent: 7046420 (2006-05-01), Hunter et al.
Corrigan, Robert, et al, “Silicon Light Machines—Grating Light Valve Technology Brief”, Jun. 2001, pp. 1-8; Silicon Light Machines, Sunnyvale, California.
Amm, D.T., et al. “Grating Light Valve Technology: Update and Novel Applications” May 19, 1998, pp. 1-4; Presented at Society for Information Display Symposium, Anaheim, California.
Amm, David T., et al. “Optical Performance of the Grating Light Valve Technology” 1999, pp. 1-8; Silicon Light Machines, Sunnyvale, California.
Corrigan, R.W., et al. “An Alternative Architecture for High Performance Display” Nov. 20, 1999, pp. 1-5; Presented at the 141st SMPTE Technical Conference and Exhibition, New York, NY.
Bloom, D.M., et al. “The Grating Light Valve: revolutionizing display technology” 1997, pp. 1-10; Silicon Light Machines, Sunnyvale, California.
Corrigan, R.W., et al. “Calibration of a Scanned Linear Grating Light ValveTM Projection System”, May 18, 1999, pp. 1-4; Presented at Society for Information Display Symposium, San Jose, California.
Leung Omar S.
Payne Alexander P.
Okamoto & Benedicto LLP
Silicon Light Machines Corporation
Sugarman Scott J.
Tra Tuyen
LandOfFree
Dielectric spacer for enhanced squeeze-film damping of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Dielectric spacer for enhanced squeeze-film damping of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dielectric spacer for enhanced squeeze-film damping of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3860784