Dielectric pattern formation for organic electronic devices

Details Dielectric pattern formation for organic electronic devices Dielectric pattern formation for organic electronic devices

2006-03-14

2006-03-14

Sarkar, Asok Kumar (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

Reexamination Certificate

active

07012013

ABSTRACT:
Methods and systems are provided for patterning a non conductive dielectric on a surface of a conductive polymer. The conductive polymer can be part of an organic memory cell. Hydrogen ions created form molecular hydrogen being exposed to short wave length radiation, are employed as mobile positive ion charge carriers to create a non-conductive die-electric pattern on a conductive and/or semiconductive polymer surface of the organic memory cell. Such process reduces number of masking steps performed. In addition, the process is scalable with lithographic wave length and can be performed on wide spread tool sets and photoresist material available in commercial market.

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Kaplan et al., “Optical and Electrical Properties of Ion—Beam—Irradiated Films of organic Molecular Solids and Polymers”, J. Appl. Phys. vol. 55 (3), p. 732-42 (1984).
Jung et al., “Modification of Coducting Polymers by Low Energy Reactive Ion Beams and Their Chemical effects”, Nuclear Instruments & methods in Physics Research, Section B, vol. B 80-81, Pt. 2, p. 1076-9 (1993).

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