Dielectric mirror of spatial light modulator having silicon laye

Details Dielectric mirror of spatial light modulator having silicon laye Dielectric mirror of spatial light modulator having silicon laye

1993-06-15

1995-07-18

Gross, Anita Pellman

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

359584, G02F 11335, G02B 110

Patent

active

054346894

ABSTRACT:
A dielectric mirror of a spatial light modulator having a photoconductive layer on which an image is written by a writing light carrying an image information and a photomodulator layer through which the written image is read out by irradiating a reading light and by reflecting the reading light with the dielectric mirror. The dielectric mirror is constructed by laminating plural kinds of layers respectively having different values of refractive indexes, for instance, Si layers and SiO.sub.2 layers. The resolution of the spatial light modulator degrades when an oxygen content rate in the Si layers becomes below a certain amount, on the contrary, the contrast ratio of the spatial light modulator degrades when the oxygen content rate in the Si layers becomes above a certain amount. The Si layers of the present invention have an oxygen content rate ranging from 10 to 40 atom %, preferably ranging from 15 to 35 atom %.

REFERENCES:
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patent: 5076670 (1991-12-01), Sayyah
patent: 5084777 (1992-01-01), Slobodin
patent: 5126880 (1992-06-01), Wheatley et al.
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patent: 5155609 (1992-10-01), Konno et al.
patent: 5272554 (1993-12-01), Ji et al.
Applied Physics Letter, vol. 22, No. 3, Feb. 1973, Beard et al. AC Liquid-Crysteal Light Valve.

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