Dielectric micromechanical element

Electrical generator or motor structure – Dynamoelectric – Rotary

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310309, H02K 5700, H02N 106

Patent

active

055720765

DESCRIPTION:

BRIEF SUMMARY
FIELD OF THE INVENTION

The field of the present invention is microelectronics in which miniaturized mechanical elements may find use as drive, control switch and sensor systems. Utilization in chemistry and biotechnology is also possible.


BACKGROUND OF THE INVENTION

Miniaturized motors with dielectric rotors in an enveloping medium that can be set into rotation via several electrodes/GEO 10 (1988) 188, U.S. Pat. No. 4,740,410, are known as dieletric motors. Continuously or discontinuously rotating electric fields are employed for this purpose. Linear motions by dielectrics in electrical fields are described in textbooks under the heading electrophoresis, dielectrophoresis, respectively general ponderomotoric effects Greiner, Theor. Physik Bd. 3, Vlg. H. Deutsch, Thun & Frankfurt a.M., (1982), Pohl, Dielectrophoresis, Cambridge University Press, Cambridge-London-New York-Melbourne, (1978). Landau & Lifschitz, Bd. 1, Akademie-Vlg. Berlin, (1973). The pondermotoric effect is utilized to collect floating particles in air filter devices or to collect cells in biology. Devices of this type work with or more electrodes and a direct current and alternating current electric field. Use of linearly progressing field vectors is not known in this connection. Use of dielectric miniature elements, apart from dielectric motors, has not been described. Linearly progressing magnetic field vectors, on the other hand, are known in connection with electric induction effects and induction field motors Guldner, Electronica Bd. 238, Militarverlag der DDR, (1987). The disadvantage of dielectric micromechanic elements is the small force while, however, also having minimal currents. Their extreme possible miniaturization has not been recognized as an advantage (GEO 10 (1988), 188) until recent years.
An object of the present invention is to provide a cost-effective dielectric micromechanical element possessing universal possible application in microelectronics.


SUMMARY OF THE INVENTION

Another object of the present invention is the development of a dielectric micromechanical element with linear motion having constant and variable states of motion and being able to be universally utilized in microelectronics. The response time is intended to lie in the milli-second range and below.
In accordance with the present invention, these and other objects are met in that a dielectric homogeneously or inhomogenously constructed rotor supported in a known manner in an enveloping medium is moved with the aid of one or several linearly progressing electric fields. In accordance with the present invention, a linearly progressing field vector is generated for this purpose via electrodes disposed at at least two sides of the rotor, but not necessarily being in direct mechanical contact therewith. Dependent on the combination of the dielectrics of the rotor, its arrangement, the electric properties of the enveloping medium and the arrangement and pattern of the electrodes, which may also be arranged spacially in a matrix, the rotor follows the electric field or moves in the opposite direction. The moving behavior of the rotor can be fixed by the selection and arrangement of the dielectrics and can to a great extent be adapted to the requirements at hand. The motion of the rotor may be exactly controlled by the type of triggering of the electrodes, the velocity and the amplitude of the progressing field. Dependent on the velocity of the motion of the electric field, a change in the moving direction of the rotor can be obtained without changing the direction of the former. The mentioned possible modes of construction and triggering yields a multiplicity of surprising characteristic curves that describe the motion of the rotor as a function of the motion of the field. The motion of the field can be obtained technically via several phase-shifted alternating current voltages or discontinuous triggering of the electrodes. The overall micromechanical system may be made using micromechanical methods and therefore be extremely miniaturized. The require

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Geo; Oct. 1988, (No Publisher's Name & Location).
W. Greiner; Theoretische Phsik; 1982; Deutsch; Thun und Frankfurt am Main; ermany.
Dielectrophoresis; H. A. Pohl; 1978; Cambridge Univ. Press; London, New York, Melbourne.
Landau & Lifschitz; Lehrbuch der Theoretische Physik; 1973; Akademie-Verlag, Berlin, Germany.

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