Dielectric material having a low dielectric loss factor for high

Compositions: ceramic – Ceramic compositions – Refractory

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501 971, 428698, 428699, 428701, C04B 35584, B32B 1800

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active

058859160

ABSTRACT:
A dielectric material having a low dielectric loss factor for high-frequency use, which comprises a sintered product of silicon nitride chiefly composed of silicon nitride and containing at least oxygen as an impurity component or oxygen as an impurity component and a compound of an element of the Group 3a of periodic table, wherein said sintered product contains aluminum in an amount which is not larger than 2% by weight reckoned as an oxide thereof having relative densities of not smaller than 97% and has a dielectric loss factor at 10 GHz ofnot larger than 5.times.10.sup.-4. The dielectric material has excellent mechanical properties such as large strength and excellent chemical stability, features small dielectric loss factor in high-frequency regions, and is suited for use as a material for high-frequency oscillators, antennas, filters and electronic circuit boards. In particular, those dielectric materials are suited for use as window materials for introducing high frequencies in a high-frequency plasma-generating CVD apparatus, a microwave wave output unit and an oscillator.

REFERENCES:
patent: 4642299 (1987-02-01), Hsieh
patent: 4654315 (1987-03-01), Hsieh
patent: 4708943 (1987-11-01), Hsieh et al.
patent: 4834928 (1989-05-01), Su
patent: 5399536 (1995-03-01), Yamakawa et al.
Hideoki Fukushima, et al., "Measurement of Dielectric Properties of Ceramics at Microwave Frequency", pp. 61-66. (1987) no month.

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