Dielectric layer structure

Details Dielectric layer structure Dielectric layer structure

2011-06-14

2011-06-14

Smith, Matthew (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

Insulating material

C257S635000, C257SE21576, C438S778000

Reexamination Certificate

active

07960826

ABSTRACT:
A dielectric layer structure includes an interlayer dielectric (ILD) layer covering at least a metal interconnect structure and a single tensile hydrophobic film. The ILD layer further includes a low-k dielectric layer, and the single tensile hydrophobic film is positioned on the low-k dielectric layer for counteracting at least a part of a stress of the low-k dielectric layer.

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