Dielectric isolation fabrication for laser trimming

Details Dielectric isolation fabrication for laser trimming Dielectric isolation fabrication for laser trimming

1983-07-29

1984-08-28

Newsome, John H.

Coating processes

Electrical product produced

Welding electrode

357 49, 427101, B05D 306

Patent

active

044684142

ABSTRACT:
Single crystal dielectrically isolated islands are formed providing an opening in the bottom dielectric isolation of selected islands before the application of the polycrystalline support. Thin film resistor material is formed and delineated on an insulative layer over the single crystal island juxtaposed with the opening of the bottom dielectric isolation. The thin film resistive layer is trimmed using a laser.

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patent: 4255209 (1981-03-01), Morcom et al.
patent: 4272775 (1981-06-01), Compton et al.
patent: 4409609 (1983-10-01), Fukuda

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