Dielectric function of thin metal films determined by...

Details Dielectric function of thin metal films determined by... Dielectric function of thin metal films determined by...

2007-01-23

2007-01-23

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

By polarized light examination

C356S369000, C356S630000

Reexamination Certificate

active

10884718

ABSTRACT:
Determination of thin metal film dielectric function and layer thicknesses using simultaneous transmission spectroscopic ellipsometric (SE) and transmission intensity (T) measurements obtained in-situ to break correlation between thickness and optical constants of very thin absorbing films, preferably using only A.C. Components of ellipsometric and intensity characterizing electromagnetic radiation which transmits through said substrate and enters a detector.

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