Dielectric for electroluminescent devices, and methods for makin

Details Dielectric for electroluminescent devices, and methods for makin Dielectric for electroluminescent devices, and methods for makin

1985-12-27

1987-09-15

Morgenstern, Norman

Coating processes

Electrical product produced

Fluorescent or phosphorescent base coating

427 64, 427 66, 4271262, 4271263, 4272553, 427343, 427377, B05D 506

Patent

active

046939067

ABSTRACT:
Disclosed are electroluminescent devices employing a stabilized tantalum sub-oxide as a dielectric. The tantalum sub-oxide is a non-stoichiometric oxide of the general form Ta.sub.2 O.sub.m, where 4.5<m<5.0, stabilized by bonds with suitable anions such as OH. In a disclosed method, a layer of tantalum sub-oxide is deposited to a thickness of from 3000 to 4000 angstroms. More particularly, a source mixture of tantalum metal and tantalum pentoxide is provided, vaporized by electron beam evaporation, and allowed to condense on a surface. The layer of tantalum sub-oxide is exposed to anions for completing a stable oxide network. Preferably, the anions are OH radicals, and the bonds are formed by exposing the layer to a humid atmosphere. The thus-stabilized layer is reheated to remove any water.

REFERENCES:
patent: 3522071 (1970-07-01), Yokota et al.
patent: 3927224 (1975-12-01), Levene
patent: 4201798 (1980-08-01), Lindmayer
patent: 4263339 (1981-04-01), Fischer

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