Dielectric film structure, piezoelectric actuator using...

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Reexamination Certificate

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Reexamination Certificate

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07059711

ABSTRACT:
The present invention provides a dielectric film structure having a substrate and a dielectric film provided on the substrate and in which the dielectric film has (001) face orientation with respect to the substrate, and in which a value u in the following equation (1) regarding the dielectric film is a real number greater than 2:in-line-formulae description="In-line Formulae" end="lead"?u=(Cc/Ca)×(Wa/Wc)  (1)in-line-formulae description="In-line Formulae" end="tail"?where, Ccis a count number of a peak of a (00l′) face of the dielectric film in an Out-of-plane X ray diffraction measurement (here, l′ is a natural number selected so that Ccbecomes maximum); Cais a count number of a peak of a (h′00) face of the dielectric film in an In-plane X ray diffraction measurement (here, h′ is a natural number selected so that Ccbecomes maximum); Wcis a half-value width of a peak of the (00l′) face of the dielectric film in an Out-of-plane rocking curve X ray diffraction measurement; and Wais a half-value width of a peak of the (h′00) face of the dielectric film in an In-plane rocking curve X ray diffraction measurement.

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*See text of IDS for explanation.
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