Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2011-05-24
2011-05-24
Nguyen, Ha Tran T (Department: 2858)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S765010, C324S760020
Reexamination Certificate
active
07948259
ABSTRACT:
A system for testing and a method for making a semiconductor device is disclosed. A preferred embodiment includes a conductor overlying a dielectric layer. The conductor is coupled to a first test pad via a first conducting line and to a second test pad via a second conducting line.
REFERENCES:
patent: 6351134 (2002-02-01), Leas et al.
patent: 6902942 (2005-06-01), Wu et al.
Martin, A., et al., “Fast and Reliable WLR Monitoring Methodology for Assessing Thick Dielectrics Test Structures Integrated in the Kerf of Product Wafers,” 2002 IRW Final Report, 2002, pp. 83-87.
Martin Andreas
Mitchell Andrea
Rydén Karl-Henrik
Infineon - Technologies AG
Nguyen Ha Tran T
Nguyen Trung Q
Slater & Matsil L.L.P.
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