Dielectric film

Details Dielectric film Dielectric film

2005-05-10

2005-05-10

Lee, John R. (Department: 2881)

Radiant energy

Ionic separation or analysis

Ion beam pulsing means with detector synchronizing means

C250S288000, C250S281000

Reexamination Certificate

active

06891155

ABSTRACT:
A dielectric film is provided which includes a base layer and a capping layer, preferably silicon oxynitride, wherein the film is an effective moisture and ion barrier when disposed between a conductive substrate and a liquid having an electrical potential different than the electrical potential of the substrate.

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