Dielectric film

Details Dielectric film Dielectric film

1992-06-12

1993-07-06

Robinson, Ellis P.

Stock material or miscellaneous articles

Composite

Of quartz or glass

428336, 428432, 428469, 428472, 428688, 428689, 428697, 428701, 428702, 428901, 428917, 174250, 174255, 257 2, 257499, B32B 1706

Patent

active

052252868

ABSTRACT:
A tantalum oxide dielectric film includes tantalum oxide (Ta.sub.2 O.sub.5) as a major component, and at least one oxide selected from the group consisting of yttrium oxide (Y.sub.2 O.sub.3), tungsten oxide (WO.sub.3) and niobium oxide (Nb.sub.2 O.sub.5). This dielectric film exhibits a remarkably improved dielectric constant and insulation property because it is a composite oxide film in which Ta.sub.2 O.sub.5 is compounded with Y.sub.2 O.sub.3, WO.sub.3 or Nb.sub.2 O.sub.5. For example, when the dielectric film is used as a capacitor film, the capacitor film exhibits a figure of merit, i.e., a product of a dielectric constant and an insulation property, approximately twice the silicon oxide (SiO.sub.2) film which is used widely for the purpose at present.

REFERENCES:
patent: 4112193 (1978-09-01), Higuchi
patent: 4734340 (1988-03-01), Saito et al.
patent: 4961994 (1990-10-01), Cariou
patent: 4973526 (1990-11-01), Haluska
patent: 5064729 (1991-11-01), Zegarski

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