Dielectric device and its manufacturing method

Details Dielectric device and its manufacturing method Dielectric device and its manufacturing method

2007-12-20

2010-06-01

Parker, Frederick J (Department: 1792)

Coating processes

Solid particles or fibers applied

Plural particulate materials applied

C427S193000

Reexamination Certificate

active

07727585

ABSTRACT:
A manufacturing method of a dielectric device includes steps described below. (1) Mixing step: Powders serving as a matrix and additive powders for sintering the matrix are mixed. (2) Mixture heat-treating step: The mixture of the matrix and the additive that has been subject to the mixing step is heat-treated. (3) Deposition layer formation step: The material powders obtained through the mixture heat-treating step are injected toward a substrate so as to form a deposition layer on the substrate. (4) Deposition layer heat-treating step: The deposition layer formed on the substrate through the deposition layer formation step is heat-treated so as to form the dielectric layer on the substrate.

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Akedo et al., “Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb/Zr52/Ti48)O3) Thick Films Deposited by Aerosol Deposition Method”. Jpn. J. Appl. Phys. vol. 38 (1999), pp. 5397-5401.
Adachi et al., “Preparation of Piezoelectric Thick Films using a Jet Printing System”. Jpn. J. Appl. Phys. vol. 36 (1997), pp. 1159-1163.

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