Dielectric barrier discharge lamp with a base

Details Dielectric barrier discharge lamp with a base Dielectric barrier discharge lamp with a base

2007-05-29

2007-05-29

Santiago, Mariceli (Department: 2879)

Electric lamp and discharge devices

Electrode exterior to envelope

C313S318010, C313S318070, C313S607000

Reexamination Certificate

active

10514814

ABSTRACT:
An elongated dielectric barrier discharge lamp with outer and inner electrodes has a tube that is arranged on the lamp stand end of the discharge vessel and that surrounds the lamp stand. The tube serves to receive a seal in order to install the lamp in a process chamber in a gastight manner. Power supply of the outer electrodes is separated from the power supply for the inner electrodes coming out of the lamp stand by means of the above-mentioned tube. This makes it possible to prevent effectively parasitic discharges between the power supplies which are applied at different potentials during operation also in process chambers under negative pressure.

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