Abrading – Abrading process – Glass or stone abrading
Patent
1998-02-17
2000-01-04
Hail, III, Joseph J.
Abrading
Abrading process
Glass or stone abrading
451386, 451398, 451402, 451441, B24B 4106
Patent
active
060103922
ABSTRACT:
A fixture for holding a semiconductor die against an abrasive media for the purpose of thinning the die is described. The fixture provides means for aligning the back of the die to a reference plane that is coplanar with the plane of the abrasive and is in contact with the abrasive media during the thinning process.
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IBM Technical Disclosure Bulletin, vol. 31, No. 04, Sep., 1988, "Multi-Prupose Lapping/Polishing Fixture for Microanalysis".
Evans Richard J.
Phoenix Philip S.
Vallett David P.
Hail III Joseph J.
Hong William
International Business Machines - Corporation
Walter, Jr. Howard J.
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