Semiconductor device manufacturing: process – With measuring or testing – Packaging or treatment of packaged semiconductor
Patent
1994-07-20
1997-08-05
Picardat, Kevin
Semiconductor device manufacturing: process
With measuring or testing
Packaging or treatment of packaged semiconductor
438 17, 438460, H01L 2100
Patent
active
056542046
ABSTRACT:
An integrated circuit probing method and apparatus therefor. The apparatus includes a main system controller coupled to a network interface, graphic user interface, and equipment interface. A high speed bus connects the main system controller to a group of subsystems. The subsystems includes subsystems such as input cassettes, input frame handing, frame to align, die align, die probing, die bin and die output, output cassettes subsystem, among others. The integrated circuit probing apparatus allows for probing of each individual die through the die probing subsystem, typically a high speed subsystem.
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