Die detachment apparatus comprising pre-peeling structure

Details Die detachment apparatus comprising pre-peeling structure Die detachment apparatus comprising pre-peeling structure

2006-10-16

2010-02-23

Tugbang, A. Dexter (Department: 3729)

Metal working

Means to assemble or disassemble

Means to disassemble electrical device

C029S743000, C029S739000, C156S345420, C156S583200

Reexamination Certificate

active

07665204

ABSTRACT:
An apparatus and method are provided for detaching a die from an adhesive film, the apparatus comprising a vacuum platform having a surface configured to support a part of the adhesive film on which the die is attached. A plurality of pre-peeling columns having substantially flat contact surfaces are projectable relative to the surface of the vacuum platform to push against the adhesive film at the position of the die to generate initial peeling between the die and the adhesive film. Thereafter, a plurality of ejector pins that are positionable relative to the pre-peeling columns are operative to push against the adhesive film at the position of the die to generate further peeling between the die and the adhesive film. The die is then removed from the adhesive film.

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