Die bonding device

Details Die bonding device Die bonding device

1996-09-13

1998-09-01

Heinrich, Samuel M.

Metal fusion bonding

With means to juxtapose and bond plural workpieces

Plural discrete workpieces

228447, 228 495, 414941, 29742, 29743, H01L 2160

Patent

active

057998582

ABSTRACT:
A die bonding device is disclosed. The device includes a frame member, a first bonding head having controlled horizontal linear movement along the frame member, wafer supporting means for supporting a wafer from which semiconductor chips are formed, first semiconductor chip suction means installed in the first bonding head for picking up semiconductor chips from the wafer by vacuum suction, lead frame transferring means for transferring a lead frame to a semiconductor chip bonding position, a second bonding head having controlled horizontal linear movement along the frame member, a pre-alignment system for aligning a semiconductor chip from the first semiconductor chip suction means, and second semiconductor chip suction means installed in the second bonding head for picking up semiconductor chips aligned according to the pre-alignment system. The die bonding device is capable of performing direct bonding or indirect bonding as required and may include a collet exchanger.

REFERENCES:
patent: 4010885 (1977-03-01), Keizer et al.
patent: 4797994 (1989-01-01), Michaud et al.
patent: 4878610 (1989-11-01), Mori et al.
patent: 4935803 (1990-06-01), Kalfus et al.

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