Die bonder with electrically driven scrubbing means

Metal fusion bonding – Means to apply vibratory solid-state bonding energy to work

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228 31, 228 61, 310 15, B23K 106

Patent

active

046142924

ABSTRACT:
A die bonder for bonding a semiconductor die to a substrate is disclosed. The die bonder comprises a support assembly within a frame, which assembly supports an arm. Attached to said arm is a means for holding a die, e.g. a vacuum collet. A variable electrical scrubbing means comprises a plunger which oscillates reciprocally within an electromagnetic coil and contacts the arm, or a tab integral with said arm. This provides a corresponding uniform scrubbing action, perpendicular to said arm in the plane of the interface between the die and the substrate, between a die held by the holding means and a solder material interposed between the die and substrate.

REFERENCES:
patent: 3302277 (1967-02-01), Pruden et al.
patent: 3451607 (1969-06-01), Miller et al.
patent: 3790738 (1974-02-01), Laub et al.
patent: 3822465 (1974-07-01), Frankort et al.

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