Die and method of making same

Details Die and method of making same Die and method of making same

1984-01-25

1986-04-01

Metz, Andrew H.

Chemistry: electrical and wave energy

Processes and products

83697, 156515, 156651, 1566611, 204 321, 204 381, C23F 102, B44C 122

Patent

active

045796343

ABSTRACT:
A method for chemically milling an etchable workpiece by exposure thereof to an etchant in order to mill selected etchant-active areas and thereby form a plurality of raised die elements separated and bounded by a plurality of recessed cavities is comprised of the steps of initially, partially etching the workpiece to form recessed die element precursors separated and bounded by recessed cavities, depositing a film of an etchant-resistant composition on the workpiece in at least selected ones of the recessed cavities, filling those selected cavities with an etchant-resistant filler and then subsequently processing the workpiece to form a die. The die is then completed by deposition of a film of a tribological composition, which may be the same as or different from the etchant-resistant composition, within those recessed cavities not theretofore bearing the etchant-resistant film.

REFERENCES:
patent: 3802078 (1974-04-01), Denes
patent: 3829969 (1974-08-01), Fischbein et al.
patent: 3911579 (1975-10-01), Lane et al.
patent: 4447286 (1984-05-01), Weglin
F. A. Lowenheim, Electroplating, McGraw-Hill Book Co., New York, 1978, pp. 211-212, 269, 281-283.

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