Dicing machine

Details Dicing machine Dicing machine

2002-04-25

2004-05-11

Choi, Stephen (Department: 3724)

Abrading

Accessory

Guard or housing

C125S013010

Reexamination Certificate

active

06733377

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a dicing machine, and more specially, to a dicing machine which provides a shielding plate between a processing part and an imaging device.
2. Description of the Related Art
FIG. 7
is a side view of a processing part of a conventional dicing machine, where a rotating blade
21
processing a work W is attached to an end of a spindle, in which a high frequency motor (not shown) is built. The work W is loaded on a work table
31
, which moves along an X direction in
FIG. 7
to cut the work W with the rotating blade
21
. During the cutting, a large amount of water is applied to the rotating blade
21
through a cutting solution nozzle and a coolant nozzle (not shown), and the processing part
20
is filled with spray and mist of the water. Next to the processing part
20
, there is provided an imaging device
10
including a microscope
11
to capture an image of the work W in order to align the work W. Between the processing part
20
and the microscope
11
, a stationary shielding wall
71
A is arranged to prevent the mist and spray in the processing part
20
from spattering on the microscope
11
. A pre-washing nozzle
26
and an air curtain nozzle
27
are provided beside the bottom part of the shielding wall
71
A, and an air curtain produced by the air curtain nozzle
27
prevents the mist from entering through an opening under the bottom of the shielding wall
71
A.
The stationary shielding wall
71
A is fixed on a wall (not shown) that is at the rear of the processing part
20
. For this reason, when the operator changes the blade
21
to a new one with tools in both hands, there is a problem that the shielding wall
71
A interferes with replacement of the blade
21
. In recent years, a dicing machine called a twin dicing machine has come into the spotlight in which two spindles with two rotating blades are arranged so as to face each other. In the twin dicing machine, this problem is clearer and should be solved because the operator needs to reach around the rotating blade with his or her hands from the rear side to the front side of the spindles in order to change the blade on the front spindle.
SUMMARY OF THE INVENTION
In view of the foregoing, it is an object of the present invention to provide a dicing machine in which a shielding plate does not interfere with replacement of blades, even if two spindles on which the blades are attached are arranged to face to each other in a twin dicing machine.
In order to achieve the above-described object, the present invention is directed to a dicing machine, comprising: a processing part which processes a work with cutting solution; an imaging device which captures an image of a surface of the work; a shielding plate which prevents the cutting solution from sputtering on the imaging device, the shielding plate being movably arranged between the processing part and the imaging device; and a driving device which moves the shielding plate back and forth between a shielding position to cover the processing part and a retreated position to open the processing part.
According to the present invention, the shielding plate which can move back and forth is provided between the processing part and the imaging device, so that the shielding plate can check mist and spray due to splashing cutting solution and the shielding plate can be positioned at the retreated position in the case of being unnecessary.
Preferably, the shielding plate is positioned at the shielding position when the work is being processed, and the shielding plate is positioned at the retreated position when a blade provided in the processing part for processing the work is changed.
According to the present invention, the shielding plate is positioned at the retreated position when the operator changes the blade. Thus, when the operator replaces the old blade with a new one while using tools with both hands, the shielding plate does not interfere with replacement of the blades.
Preferably, the driving device comprises a closed moving-magnet air cylinder.
According to the present invention, even if the environment is filled with the cutting solution and mist, water does not enter the inside of the cylinder and the driving device does not break down.


REFERENCES:
patent: 4999895 (1991-03-01), Hirose et al.
patent: 5342156 (1994-08-01), Baba
patent: 5435675 (1995-07-01), Rutschle
patent: 5531004 (1996-07-01), Ahn
patent: 5603851 (1997-02-01), Noda et al.
patent: 5971679 (1999-10-01), Kim
patent: 6105567 (2000-08-01), Sun et al.
patent: 6358115 (2002-03-01), Koike et al.

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