Diazodisulfones

Details Diazodisulfones Diazodisulfones

2008-04-01

2008-04-01

Stockton, Laura L. (Department: 1626)

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

C534S558000, C534S565000

Reissue Patent

active

09810650

ABSTRACT:
wherein R1is a C3-8branched or cyclic alkyl group, and R2is a C1-8straight-chain, branched or cyclic alkyl group, is effective as a photoacid generator when used in a photoresist material for light of 300 nm or less.

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