Diazo emulsion processor

Details Diazo emulsion processor Diazo emulsion processor

1976-10-07

1977-09-13

Moses, R. L.

354324, G03D 700

Patent

active

040486451

ABSTRACT:
Apparatus for use in developing diazo emulsion media (e.g. plates, films, etc.) for use as integrated circuit masks wherein a developing gas is utilized; the apparatus including a developing chamber for housing the media and containing the gas during developing; an accumulator and reservoir for storing the gas when developing is not taking place; a pump for evacuating the developing chamber of air and the developing gas and for pressurizing the gas in the accumulator reservoir; a plurality of solenoid valves for regulating gas flow between the developing chamber, the pump, and the reservoir; and a control unit for automatically controlling the developing process.

REFERENCES:
patent: 3000288 (1961-09-01), Winnek
patent: 3147687 (1964-09-01), Halden

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