Diaphragm valve for the vacuum exhaustion system

Details Diaphragm valve for the vacuum exhaustion system Diaphragm valve for the vacuum exhaustion system

2004-02-09

2008-08-26

Hepperle, Stephen M. (Department: 3753)

Valves and valve actuation

Reciprocating valve

Diaphragm

C251S368000

Reexamination Certificate

active

07416165

ABSTRACT:
A diaphragm valve1is provided with a body2having a flow-in passage6,a flow-out passage7,and a valve seat8formed between the passages; a diaphragm3installed in the body2and permitted to rest on and move away from the valve seat8;and a driving means4installed on the body2to allow the diaphragm3to rest on and move away from the valve seat8,wherein synthetic resin films5of predetermined thickness are coated on fluid-contacting parts25of the afore-mentioned body2and diaphragm3.A diaphragm valve in accordance with the present invention prevents corrosion of the valve members caused by accumulation and adherence of substances produced by thermal decomposition, and prevents clogging caused by substances produced, and prevents seat leakage when applied in the vacuum exhaust system of a semiconductor manufacturing facility.

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