Diaphragm-type sensor

Details Diaphragm-type sensor Diaphragm-type sensor

1993-05-10

1994-03-08

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320411, G01F 168

Patent

active

052917819

ABSTRACT:
A diaphragm-type sensor is disclosed which comprises a substrate including a cavity, a diaphragm formed on the cavity and supported by the substrate, a heater element arranged on the diaphragm, two sensor elements arranged on both sides of the heater means and slits between the heater means and the respective sensor means. The slits are effective in completely preventing the deformation of the diaphragm due to a heat propagated from the heater element, from influencing the sensor elements, whereby the diaphragm-type sensor exhibits stable output characteristics.

REFERENCES:
patent: 4471647 (1984-09-01), Jerman et al.
patent: 4501144 (1985-02-01), Higashi et al.
patent: 4542650 (1985-09-01), Renken et al.
patent: 5050429 (1991-09-01), Nishimoto et al.

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