Diaphragm type pressure sensor

Details Diaphragm type pressure sensor Diaphragm type pressure sensor

2007-09-18

2007-09-18

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S716000, C073S718000, C073S724000

Reexamination Certificate

active

11350728

ABSTRACT:
A diaphragm pressure sensor includes a first insulating substrate, a conductive substrate with a diaphragm, and a second insulating substrate with a gas inlet are bonded so as to form a pressure reference room between the diaphragm and the first insulating substrate and a pressure measuring room between the diaphragm and the second insulating substrate. The deformation of the diaphragm caused by the pressure difference between the pressure measuring room and the pressure reference room is measured to obtain the pressure of a space which is communicated with the pressure measuring room through the gas inlet. Furthermore, a plate is adhered to a surface of at least one of the first and second insulating substrates and the plate has a lower thermal expansion rate in an ambient temperature than that of the insulating substrate to which the plate is adhered.

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