Valves and valve actuation – Fluid actuated or retarded – With mechanical movement between actuator and valve
Patent
1995-11-06
1997-08-05
Walton, George L.
Valves and valve actuation
Fluid actuated or retarded
With mechanical movement between actuator and valve
92130D, 92136, 251 636, 251250, 251263, 251331, F16K 711, F16K 31122, F16K 3116, F16K 3154
Patent
active
056534191
DESCRIPTION:
BRIEF SUMMARY
FIELD OF THE INVENTION
The present invention relates to a diaphragm type high pressure shut-off valve provided in a gas piping system for introducing or shutting off a high pressure and high purity gas used for production of, for instance, semiconductor devices or the similar purposes.
BACKGROUND TECHNOLOGY
As this type of diaphragm type high pressure shut-off valve, there has been known, for instance, the one described in Japanese Utility Model Laid-Open Publication No. 131077/1989. In the diaphragm type high pressure shut-off valve described above, a first housing for accommodating a driving mechanism comprising a piston, a coil spring or the like and a second housing for accommodating a power amplifying mechanism comprising a rack pinion, an eccentric disk cam or the like are provided, a rack for the driving mechanism for supplying compressed air or reducing a pressure thereof is moved in a direction crossing a pulsating direction of the diaphragm, a circular and eccentric disk cam of the power amplifying mechanism is rotated in association with movement of the rack described above, and a valve hole is kept in the open or closed state by a diaphragm contacting an edge portion of a stem contacting the disk cam in its axial direction.
With the configuration based on the conventional technology described above, however, the first and second housings are located side by side, and especially the driving mechanism drives in a direction perpendicular to a direction of pulsation of the diaphragm, so that there are some restriction in minimization of the housing due to technological limits in development of material for each mechanism when the present application was filed, and also stress is placed only on the functions and the external shape is ignored so that the structure has rather an irregular form, and for this reason the conventional type of diaphragm high pressure shut-off valve is inconvenient in handling and causes many troubles in designing of a piping system or installation thereof. For instance, when a plurality of shut-off valves are provided side by side, sometimes a length in a direction along which the plurality of shut-off valves are laid may become too long, of physical interference may occur between adjoining shut-off valves, which is disadvantageous.
It should be noted that, in the U.S. Pat. No. 4,700,735, as understood from FIG. 10 and FIG. 11 thereof, a configuration enabling solution of the disadvantages caused by providing said first and second housings side by side is disclosed. In this configuration described above, a first accommodating portion for accommodating a driving mechanism for driving a coil spring, a piston or the like and a second accommodating portion for accommodating a pinion and a power amplifying mechanism for an eccentric cam each attached discretely to the same shaft are provided in a housing, the second accommodating portion is covered with two sheets of detachable plates, the first accommodating portion is piled up on the second accommodating portion for realizing a two-layered construction, a rack provided so that it hangs down over the piston is abutting the pinion, the diaphragm is pulsated by a stem contacting the eccentric cam, thus a valve hole being opened or closed.
In the configuration described above, however, the housing is two-layered, or it is necessary to use a plate for covering, so that adequate simplification in at least the general external shape has not been achieved.
In addition the coil spring is accommodated in the first accommodating portion, so that a length thereof is limited to a substantially half of the full height, and for this reason, energized force is limited according to the length, which is a severe restriction in minimization of the configuration.
Furthermore the configuration comprises various components such as a piston, a rack, a pinion, an eccentric cam or the like, so that a number of parts and a number of processes for assembling the parts are apt to become larger.
Furthermore in the two examples of the conventional tec
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Uchisawa Osamu
Yamashima Jun
Kabushiki Kaisha Motoyama Seisakusho
Walton George L.
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