Diaphragm structure

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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Reexamination Certificate

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07409865

ABSTRACT:
A diaphragm structure with a first substrate including a first surface with an annular groove therein and a second opposing surface with an annular groove on each side of annular groove in the first surface defining a first diaphragm. A second substrate also includes a first surface with an annular groove therein and a second opposing surface with an annular groove on each side of the annular groove in the first surface defining a second diaphragm. A diaphragm overload stop is located behind the first and second diaphragms.

REFERENCES:
patent: 4089036 (1978-05-01), Geronime
patent: 1273896 (2003-01-01), None
U.S. Appl. No. 11/241,049, filed Sep. 30, 2005, Kanakasabapathi, Subramanian.

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