Diaphragm structure

Details Diaphragm structure Diaphragm structure

2007-07-24

2007-07-24

Schuberg, Darren E (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C347S027000, C347S048000, C347S068000, C347S072000

Reexamination Certificate

active

11315895

ABSTRACT:
There is disclosed a diaphragm structure that includes: a ceramic substrate3in which at least one opening2is formed, and a thin diaphragm portion4having a shape protruding on a side opposite to the opening2and constituted of a ceramic fired integrally with the ceramic substrate3in such a manner as to cover the opening2.An opening shape of the opening2is a shape including at least one tip portion5in a longitudinal direction, having a curved shape, and a tapered portion6whose opening width gradually narrows toward the tip portion5and which is constituted of a curve or a straight line, and a portion of the diaphragm portion4corresponding to the tapered portion6has such a shape that a protruding height gradually lowers toward the tip portion5.

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