Electrical resistors – Resistance value responsive to a condition – Fluid- or gas pressure-actuated
Patent
1985-01-25
1986-07-15
Albritton, Clarence L.
Electrical resistors
Resistance value responsive to a condition
Fluid- or gas pressure-actuated
338 4, 310338, 73720, H01L 1010
Patent
active
046009124
ABSTRACT:
A diaphragm-type pressure sensor employs a monocrystalline wafer as a pressure-responsive diaphragm. The wafer has a central active area surrounded by a first bonding area on one side and a second bonding area on the other side. The first bonding area is attached by a first layer of bonding material to a base, and the second bonding area is attached by a second layer of bonding material to a cap. The inside diameter of the first bonding layer is greater than the inside diameter of the second bonding layer by an amount of at least approximately six times the thickness of the diaphragm. This disparity between the respective inside diameters of the two bonding layers results in the relief of radially-directed tensile loading on the first bonding layer when a pressure to be measured is applied to the first side of the diaphragm. Consequently, the probability of a fracture occurring in this bonding layer is minimized.
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Marks Eugene A.
Peters Arthur J.
Albritton Clarence L.
Becker William G.
Bourns Instruments, Inc.
Klein Howard J.
Lateef M. M.
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