Diaphragm pressure measuring cell arrangement

Details Diaphragm pressure measuring cell arrangement Diaphragm pressure measuring cell arrangement

2008-12-04

2009-11-10

Caputo, Lisa M (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C361S283400

Reexamination Certificate

active

07614308

ABSTRACT:
A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.

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patent: 372988 (1989-12-01), None
patent: 461459 (1991-05-01), None
patent: WO 2008/122134 (2007-04-01), None

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