Electrical resistors – Resistance value responsive to a condition – Fluid- or gas pressure-actuated
Patent
1992-03-31
1993-11-23
Lateef, Marvin M.
Electrical resistors
Resistance value responsive to a condition
Fluid- or gas pressure-actuated
338 4, 338 5, 338 47, 338 36, 73727, 73 48, 73862474, H01C 1010
Patent
active
052648206
ABSTRACT:
A pressure transducer for measuring high differential pressure media in a harsh environment where a diaphragm assembly is mounted to an intermediate support number which is mounted to a main support member where the high pressure media impinges on the diaphragm to create a force opposing that provided by the diaphragm support structure thereby loading the diaphragm in compression. The strain sensitive piezoresistive elements are protected and sealed from the low pressure media by a passivation layer and electrical signal leads are attached to bonding pads formed on the diaphragm assembly which are sealed to the intermediate support member by a sealing cap.
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IEEE 1985 International Conference of Solid-State Sensors and Actuators, Digest of Technical Papers, E. Obermeier, "Polysilicon Layers Lead to New Generation of Pressure Sensors", p. 430 (1985).
Hoinsky Christopher C.
Kovacich John A.
Rago Ricardo A.
Van Vessem Peter D.
Eaton Corporation
Lateef Marvin M.
Uthoff L. H.
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