Diaphragm deflection sensor for fused silica diaphragm module

Details Diaphragm deflection sensor for fused silica diaphragm module Diaphragm deflection sensor for fused silica diaphragm module

1984-04-03

1986-07-15

LaRoche, Eugene R.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250237G, G01D 534

Patent

active

046008365

ABSTRACT:
A high temperature pressure transducer and sensing apparatus to determine the deflection of the transducer diaphragm is disclosed. The pressure transducer utilizes a fused silica diaphragm (12) which is illuminated at selected locations by a coherent laser source (52) via optical fibers (38, 46). The light reflected by the diaphragm (12) forms interference fringe patterns which are focused by gradient index rod lenses (36) on the ends of optical fibers (40, 48) for transmission to a fringe counting circuit (54). By digital techniques, the fringe count is converted into a determination of diaphragm deflection.

REFERENCES:
patent: 4428239 (1984-01-01), Johnston
patent: 4495819 (1985-01-01), Tekippe
patent: 4543831 (1985-10-01), Meyer

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