Diamond thermistor and manufacturing method for the same

Details Diamond thermistor and manufacturing method for the same Diamond thermistor and manufacturing method for the same

1990-08-23

1992-02-18

Lateef, Marvin M.

Electrical resistors

Resistance value responsive to a condition

Current and/or voltage

29612, H01C 710

Patent

active

050898027

ABSTRACT:
A diamond thermistor is described. Surface portions of temperature sensing diamond of the thermistor are doped with impurity ions by ion implantation except for a sensing area thereof. A pair of electrodes are formed on the impurity regions in order to make good ohmic contacts with the diamond. The damage caused by the ion implantation is remedied by subjecting the diamond film to laser annealing.

REFERENCES:
patent: 3832668 (1974-08-01), Berman
patent: 4806900 (1989-02-01), Fujimori et al.

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