Diamond thermistor

Details Diamond thermistor Diamond thermistor

1992-09-16

1994-05-31

Lateef, Marvin M.

Electrical resistors

Granular or powdered element

Carbon particles

H01C 710

Patent

active

053173023

ABSTRACT:
A diamond thermistor having a pair of diamond contact regions having a low resistance formed on a temperature sensing diamond substrate. The formation of the diamond contact regions is carried out by depositing a diamond film using a carbon compound gas and a dopant gas and etching the diamond film to leave the contact regions by an etchant including fluorine or oxygen.

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patent: 5081438 (1992-01-01), Nakahata et al.
patent: 5089802 (1992-02-01), Yamazaki
patent: 5144380 (1992-09-01), Kimoto et al.
patent: 5252498 (1993-10-01), Yamazaki

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