Diamond semiconductor device with a non-doped diamond thin film

Details Diamond semiconductor device with a non-doped diamond thin film Diamond semiconductor device with a non-doped diamond thin film

1990-10-04

1992-09-01

Hille, Rolf

357 13, 357 16, 357 15, 357 28, H01L 2980

Patent

active

051443805

ABSTRACT:
A semiconductor device utilizing a nondoped diamond layer between a substrate and an active diamond layer. Such a structure decreases the resistivity and increases the carrier density. Further, when contacts are formed on the active layer, this layer structure reduces reverse leak current.

REFERENCES:
patent: 4863529 (1989-09-01), Imai et al.
patent: 4929986 (1990-05-01), Yoder
patent: 4947220 (1990-08-01), Yoder
patent: 4981818 (1991-01-01), Anthony et al.
patent: 4982243 (1991-01-01), Nakahata et al.
A. T. Collins, "Daimond electronic devices-a critical appraisal", Semiconductor Science and Tech., Aug. (1989), pp. 605-611.

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