Active solid-state devices (e.g. – transistors – solid-state diode – Specified wide band gap semiconductor material other than... – Diamond or silicon carbide
Patent
1992-05-18
1994-04-26
Hille, Rolf
Active solid-state devices (e.g., transistors, solid-state diode
Specified wide band gap semiconductor material other than...
Diamond or silicon carbide
257471, 257485, 257613, H01L 310312, H01L 27095, H01L 2948, H01L 2912
Patent
active
053069285
ABSTRACT:
A semiconductor device utilizing a non-doped diamond layer between a substrate and an active diamond layer. Such a structure decreases the resistivity and increases the carrier density. Further, when contacts are formed on the active layer, this layer structure reduces reverse leak current.
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A. T. Collins, "Diamond Electronic Devices-A-Critical Appraisal", Semiconductor Science and Tech., Aug. (1989), pp. 605-611.
Fujita Nobuhiko
Kimoto Tunenobu
Tomikawa Tadashi
Hille Rolf
Loke Steven
Sumitomo Electric Industries Ltd.
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